发明名称 MULTI-WAVELENGTH PHOTOELECTRIC MEASUREMENT DEVICE, CONFOCAL MEASUREMENT DEVICE, INTERFERENCE MEASUREMENT DEVICE, AND COLOR MEASUREMENT DEVICE
摘要 [Problem] To provide a multi-wavelength photoelectric measurement device, a confocal measurement device, an interference measurement device, and a color measurement device, with which it is possible, using multi-wavelength light such as white light, to highly accurately measure feature values, such as thickness, distance, displacement, or color, of an object to be measured. [Solution] The device is provided with: a laser light source; a light source optical member for focusing light from the laser light source; a fluorescent body excited by light focused by the light source optical member; an optical fiber unit comprising one or a plurality of optical fibers, the fluorescent body being provided at one end of the optical fiber unit, and the optical fiber unit being configured to receive at said first end light that is emitted from the fluorescent body, and to transmit the received light toward the other end; a head optical member for focusing light exiting from the other end of the optical fiber unit, toward an object to be measured; a photoreceptor element for selectively receiving light, depending on the wavelength, from the object to be measured, and performing photoelectric conversion to a signal corresponding to the quantity of received light; and a measurement controller for measuring a feature value of the object to be measured, on the basis of the signal indicating the wavelength-dependent quantity of received light from the photoreceptor element.
申请公布号 WO2015199054(A1) 申请公布日期 2015.12.30
申请号 WO2015JP67968 申请日期 2015.06.23
申请人 KEYENCE CORPORATION 发明人 KUGA SHOMA
分类号 G01B11/06;G01B11/00;G01J3/45;G01J3/46 主分类号 G01B11/06
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