MEGASONIC WAVE GUIDE AND MEGASONIC CLEANING APPARATUS HAVING THE SAME

摘要

The present invention relates to a megasonic wave guide and an ultrasonic cleaning apparatus including the same, and more specifically, to a megasonic wave guide which enables an object to be cleaned to be uniformly cleaned and prevents the damage to a micro pattern formed on the object to be cleaned since phases of diffused wavelengths are overlapped and diffused sound pressure can be uniform accordingly, by forming a groove in a concave shape on an ultrasonic diffusion surface of the wave guide, and to an ultrasonic cleaning apparatus including the same.