发明名称 |
CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS WITH PRESSURIZED CAVITIES |
摘要 |
A capacitive micromachined ultrasonic transducer (CMUT) is provided that includes a substrate, a bottom conductive layer disposed on a bottom surface of the substrate, a cavity disposed into a top surface of the substrate, a nonconductive layer disposed on the substrate top surface and on the cavity, a CMUT plate disposed on the nonconductive layer and across the cavity, a top conductive layer disposed on a top surface of the CMUT plate, a pressure control via that spans from the cavity to an ambient environment, and an active pressure controller connected to the pressure control via, wherein the active pressure controller is capable of actively varying a pressure differential across the CMUT plate. |
申请公布号 |
EP2959271(A1) |
申请公布日期 |
2015.12.30 |
申请号 |
EP20130875837 |
申请日期 |
2013.12.09 |
申请人 |
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
APTE, NIKHIL PRAKASH;KHURI-YAKUB, BUTRUS T.;PARK, KWAN KYU |
分类号 |
G01F1/66;B81B3/00;B81B7/00;G01N29/24 |
主分类号 |
G01F1/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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