| 摘要 |
Provided is a plasma-resistant member characterized by comprising a base and a layer structure formed on a surface of the base by an aerosol deposition method, the layer structure comprising polycrystalline yttria and having plasma resistance, wherein the polycrystalline yttria constituting the layer structure has crystal structures comprising a mixture of a cubic system and a monoclinic system, the proportion of the monoclinic system to the cubic system in the polycrystalline yttria constituting the layer structure being 0-60%, and the polycrystalline yttria constituting the layer structure has a crystallite size of 8-50 nm. |
