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发明名称
WAFER DIVIDING APPARATUS AND WAFER DIVIDING METHOD
摘要
<p>웨이퍼 분할 장치 및 웨이퍼 분할 방법을 제공한다. 상부 척 및 하부 척을 포함하는 척, 상기 상부 척과 상기 하부 척 사이의 이격된 공간으로 제공되어 상기 웨이퍼를 절삭하고 제 1 구동부에 의하여 구동되는 절삭 와이어, 및 상기 절삭 와이어에 의하여 절삭되는 상기 웨이퍼의 홈에 에칭액을 공급하는 에칭액 공급 노즐을 제공한다.</p>
申请公布号
KR101580924(B1)
申请公布日期
2015.12.30
申请号
KR20090078908
申请日期
2009.08.25
申请人
삼성전자주식회사
发明人
진호태;오선주;김희석
分类号
H01L21/301
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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