发明名称 MULTI-GATE TRANSISTOR WITH VARIABLY SIZED FIN
摘要 An embodiment includes an apparatus comprising: a non-planar transistor comprising a fin, the fin including a source region having a source region width and a source region height, a channel region having a channel region width and a channel region height, a drain region having a drain width and a drain height, and a gate dielectric formed on a sidewall of the channel region; wherein the apparatus includes at least one of (a) the channel region width being wider than the source region width, and (b) the gate dielectric including a first gate dielectric thickness at a first location and a second gate dielectric thickness at a second location, the first and second locations located at an equivalent height on the sidewall and the first and second gate dielectrics thicknesses being unequal to one another. Other embodiments are described herein.
申请公布号 WO2015199712(A1) 申请公布日期 2015.12.30
申请号 WO2014US44517 申请日期 2014.06.27
申请人 INTEL CORPORATION 发明人 NIDHI, NIDHI;JAN, CHIA-HONG;OLAC-VAW, ROMAN W.;CHANG, HSU-YU;DIAS, NEVILLE L.;HAFEZ, MAC M.;RAMASWAMY, RAHUL
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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