摘要 |
The present invention relates to a method for coating an LM guide (including an LM rail and an LM block) which is a transport device used when manufacturing a specialized electronic product such as a semiconductor or an LCD display panel with tungsten, and more specifically, to a tungsten coating method for an LM guide which forms an organic/inorganic mixed polymer layer on a surface of an LM guide which is a target coating body, and then uses a latent process to form a tungsten coating layer. Also, since the present invention first coats the target coating body with an organic/inorganic mixed polymer solution, and then uses the latent process to form the tungsten coating layer, the tungsten coating layer electrolyzed and formed on a ceramic of ultrafine particles can be easily formed inside a surface side of the target coating body in an identical manner of a tungsten coating layer formed by a convention latent process. Since the tungsten coating layer is firmly attached to the organic/inorganic mixed polymer layer, a scratch hole or a micro crack of the tungsten coating layer can be reduced. Even if a scratch hole or a micro crack is created on the tungsten coating layer, the organic/inorganic mixed polymer layer blocks corrosive external air containing an oily material to prevent separation of the tungsten coating layer. |