发明名称 TUNGSTEN COATING METHOD FOR LM GUIDE
摘要 The present invention relates to a method for coating an LM guide (including an LM rail and an LM block) which is a transport device used when manufacturing a specialized electronic product such as a semiconductor or an LCD display panel with tungsten, and more specifically, to a tungsten coating method for an LM guide which forms an organic/inorganic mixed polymer layer on a surface of an LM guide which is a target coating body, and then uses a latent process to form a tungsten coating layer. Also, since the present invention first coats the target coating body with an organic/inorganic mixed polymer solution, and then uses the latent process to form the tungsten coating layer, the tungsten coating layer electrolyzed and formed on a ceramic of ultrafine particles can be easily formed inside a surface side of the target coating body in an identical manner of a tungsten coating layer formed by a convention latent process. Since the tungsten coating layer is firmly attached to the organic/inorganic mixed polymer layer, a scratch hole or a micro crack of the tungsten coating layer can be reduced. Even if a scratch hole or a micro crack is created on the tungsten coating layer, the organic/inorganic mixed polymer layer blocks corrosive external air containing an oily material to prevent separation of the tungsten coating layer.
申请公布号 KR20150145648(A) 申请公布日期 2015.12.30
申请号 KR20140076017 申请日期 2014.06.20
申请人 ALPACO CO., LTD. 发明人 KIM, SUNG WOONG
分类号 C23C26/00;C09D127/16;C09D183/02 主分类号 C23C26/00
代理机构 代理人
主权项
地址