发明名称 |
APPARATUS AND METHOD FOR NANOPROBING OF ELECTRONIC DEVICES |
摘要 |
A method for probing a semiconductor device under test (DUT) using a combination of scanning electron microscope (SEM) and nanoprobes, by: obtaining an SEM image of a region of interest (ROI) in the DUT; obtaining a CAD design image of the ROI; registering the CAD design image with the SEM image to identify contact targets; obtaining a Netlist corresponding to the contact targets and using the Netlist to determine which of the contact targets should be selected as test target; and, navigating nanoprobes to land a nanoprobe on each of the test targets and form electrical contact between the nanoprobe and the respective test target. |
申请公布号 |
WO2015200724(A1) |
申请公布日期 |
2015.12.30 |
申请号 |
WO2015US37829 |
申请日期 |
2015.06.25 |
申请人 |
DCG SYSTEMS, INC. |
发明人 |
UKRAINTSEV, VLADIMIR;NIV, ISRAEL;BENZION, RONEN |
分类号 |
H01J37/20;G01R1/06;G01R31/28;G01R31/307;H01L21/66 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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