发明名称 APPARATUS, METHOD AND SYSTEM FOR SPECTROMETRY WITH A DISPLACEABLE WAVEGUIDE STRUCTURE
摘要 Techniques and mechanisms for a monolithic photonic integrated circuit (PIC) to provide spectrometry functionality. In an embodiment, the PIC comprises a photonic device, a first waveguide and a second waveguide, wherein one of the first waveguide and the second waveguide includes a released portion which is free to move relative to a substrate of the PIC. During a metering cycle to evaluate a material under test, control logic operates an actuator to successively configure a plurality of positions of the released portion relative to the photonic device. In another embodiment, light from the first waveguide is variously diffracted by a grating of the photonic device during the metering cycle, where portions of the light are directed into the second waveguide. Different wavelengths of light diffracted into the second waveguide may be successively detected, for different positions of the released portion, to determine spectrometric measurements over a range of wavelength.
申请公布号 WO2015199861(A1) 申请公布日期 2015.12.30
申请号 WO2015US32451 申请日期 2015.05.26
申请人 INTEL CORPORATION 发明人 HUTCHISON, DAVID, N.;KIM, KYU HYUN;RONG, HAISHENG;HECK, JOHN;XU, SHENGBO
分类号 G01J3/18;G01N21/27;G02B6/122 主分类号 G01J3/18
代理机构 代理人
主权项
地址