发明名称 |
OPTICAL COMPONENT MADE OF QUARTZ GLASS FOR USE IN ARF EXCIMER LASER LITHOGRAPHY, AND METHOD FOR PRODUCING THE COMPONENT |
摘要 |
An optical component made of synthetic quartz glass includes a glass structure substantially free of oxygen defect sites and having a hydrogen content of 0.1×1016 to 1.0×1018 molecules/cm3, an SiH group content of less than 2×1017 molecules/cm3, a hydroxyl group content of 0.1 to 100 wt. ppm, and an Active temperature of less than 1070° C. The optical component undergoes a laser-induced change in the refractive index in response to irradiation by a radiation with a wavelength of 193 nm using 5×109 pulses with a pulse width of 125 ns and a respective energy density of 500 μJ/cm2 at a pulse repetition frequency of 2000 Hz. The change totals a first measured value M193nm when measured using the applied wavelength of 193 nm and a second measured value M633nm when measured using a measured wavelength of 633 nm. The ratio M193nm/M633nm is less than 1.7. |
申请公布号 |
EP2958869(A2) |
申请公布日期 |
2015.12.30 |
申请号 |
EP20140705187 |
申请日期 |
2014.02.19 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG |
发明人 |
KUEHN, BODO |
分类号 |
C03C4/00;C03B19/01;C03B19/14;C03B20/00;C03B32/00;C03C3/06;G02B1/00;G02B1/02 |
主分类号 |
C03C4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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