发明名称 |
INTEGRATED MICRO-ELECTROMECHANICAL SWITCHES AND A RELATED METHOD THEREOF |
摘要 |
A system includes a plurality of micro-electromechanical switches including a plurality of gates, coupled to each other. Each micro-electromechanical switch includes a beam electrode disposed on a substrate. A beam includes an anchor portion coupled to the beam electrode. The beam includes a first beam portion extending from the anchor portion along a first direction; and a second beam portion extending from the anchor portion along a second direction opposite to the first direction. A first control electrode and a first contact electrode are disposed on the substrate, facing the first beam portion. A second control electrode and a second contact electrode are disposed on the substrate, facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate among the plurality of gates. The plurality of micro-electromechanical switches is arranged in at least one of a series arrangement, parallel arrangement. |
申请公布号 |
CA2952661(A1) |
申请公布日期 |
2015.12.30 |
申请号 |
CA20152952661 |
申请日期 |
2015.06.23 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
AIMI, MARCO FRANCESCO;SPENCE, DAN KENRICK |
分类号 |
H01H59/00;B81B3/00;B81B7/04 |
主分类号 |
H01H59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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