MICROPOSITIONING DEVICE WITH MULTIDEGREES OF FREEDOM FOR PIEZOELECTRIC ACTUATORS AND ASSOCIATED METHOD

摘要

A micropositioning device for a piezoelectric actuator includes a means for controlling an electric field applied to the piezoelectric actuator so as to deform the piezoelectric material, and means for simultaneous measurement of a variation of electric charge accumulated on the piezoelectric actuator resulting from the deformation; and means for acquiring measurements of the variation of electric charge, for processing these acquisitions and for estimating a displacement (x, y, z) of the piezoelectric actuator and/or an applied force.