发明名称 |
Resistive RAM and method of manufacturing the same |
摘要 |
A resistive RAM and a method of manufacturing the same are provided. The resistive RAM includes a first electrode, a second electrode, a transition metal oxide (TMO) layer between the first and second electrodes, an activated metal layer between the first electrode and the TMO layer, and a metal oxynitride layer formed on a surface of the activated metal layer in the gas environment containing oxygen and nitrogen elements. |
申请公布号 |
US9224947(B1) |
申请公布日期 |
2015.12.29 |
申请号 |
US201414492096 |
申请日期 |
2014.09.22 |
申请人 |
Winbond Electronics Corp. |
发明人 |
Chang Shuo-Che;Wen Sung-Ying |
分类号 |
H01L27/115;H01L45/00;H01L27/11;H01L49/02 |
主分类号 |
H01L27/115 |
代理机构 |
Jianq Chyun IP Office |
代理人 |
Jianq Chyun IP Office |
主权项 |
1. A resistive RAM, comprising:
a first electrode; a second electrode; a transition metal oxide (TMO) layer between the first electrode and the second electrode; an activated metal layer between the first electrode and the TMO layer; a first metal oxynitride layer formed on a surface of the activated metal layer in a gas environment containing oxygen and nitrogen elements; and a second metal oxynitride layer disposed between the second electrode and the TMO layer in the gas environment containing oxygen and nitrogen elements. |
地址 |
Taichung TW |