发明名称 Resistive RAM and method of manufacturing the same
摘要 A resistive RAM and a method of manufacturing the same are provided. The resistive RAM includes a first electrode, a second electrode, a transition metal oxide (TMO) layer between the first and second electrodes, an activated metal layer between the first electrode and the TMO layer, and a metal oxynitride layer formed on a surface of the activated metal layer in the gas environment containing oxygen and nitrogen elements.
申请公布号 US9224947(B1) 申请公布日期 2015.12.29
申请号 US201414492096 申请日期 2014.09.22
申请人 Winbond Electronics Corp. 发明人 Chang Shuo-Che;Wen Sung-Ying
分类号 H01L27/115;H01L45/00;H01L27/11;H01L49/02 主分类号 H01L27/115
代理机构 Jianq Chyun IP Office 代理人 Jianq Chyun IP Office
主权项 1. A resistive RAM, comprising: a first electrode; a second electrode; a transition metal oxide (TMO) layer between the first electrode and the second electrode; an activated metal layer between the first electrode and the TMO layer; a first metal oxynitride layer formed on a surface of the activated metal layer in a gas environment containing oxygen and nitrogen elements; and a second metal oxynitride layer disposed between the second electrode and the TMO layer in the gas environment containing oxygen and nitrogen elements.
地址 Taichung TW