Gyro sensor and electronic apparatus

摘要

A gyro sensor includes a base, a first connection arm and a second connection arm that extend from the base in opposite directions along an X axis, a first drive oscillation arm that extends from the first connection arm along a Y axis, a second drive oscillation arm that extends from the second connection arm along the Y axis, and a first detection oscillation arm and a second detection oscillation arm that extend from the base in opposite directions along the Y axis, and each of the first drive oscillation arm and the second drive oscillation arm has an oscillation component along the X axis and an oscillation component along a Z axis.

主权项

1. A gyro sensor comprising, on the condition that three axes intersecting are designated as a first axis, a second axis and a third axis, respectively:
a base; a first connection arm and a second connection arm that extend from the base in opposite directions along the first axis; a first drive oscillation arm that extends from the first connection arm along the second axis; a second drive oscillation arm that extends from the second connection arm along the second axis; and a first detection oscillation arm and a second detection oscillation arm that extend from the base in opposite directions along the second axis, wherein each of the first drive oscillation arm and the second drive oscillation arm has an oscillation component along the first axis and an oscillation component along the third axis, each of the first drive oscillation arm and the second drive oscillation arm has a portion whose cross-sectional shape perpendicular to the second axis is asymmetrical with respect to a central line cross-sectional shape along the first axis and a central line cross-sectional shape along the third axis, the first drive oscillation arm has a first drive top surface, a first drive bottom surface, a first drive side surface extending from the first drive top surface to the first drive bottom surface and a second drive side surface extend n from the first drive top surface to the first drive bottom surface, the second drive oscillation arm has a second drive top surface, a second drive bottom surface, a third drive side surface extending from the second drive top surface to the second drive bottom surface and a fourth drive side surface extending from the second drive top surface to the second drive bottom surface, the first, second, third and fourth drive side surfaces have first, second, third and fourth steps, respectively, a first drive electrode is provided on each of the first drive top surface the first drive bottom surface an entirety of the third drive side surface including the third step, and an entirety of the fourth drive side surface including the fourth step, and the first drive electrodes are electrically connected to each other, and a second drive electrode is provided on each of the second drive top surface, the second drive bottom surface, an entirety of the first drive side surface including the first step, and an entirety of the second drive side surface including the second step, and the second drive electrodes are electrically connected to each other.