发明名称 Integrated semiconductor device and method for fabricating the same
摘要 An integrated semiconductor device and method for fabricating the same are provided wherein the integrated semiconductor device comprises a substrate a first stress-inducing layer, a second stress-inducing layer and an integrated circuit layer. The first stress-inducing layer covers on the substrate. The second stress-inducing layer partially covers on the first stress-inducing layer. The integrated circuit layer is bonded over the substrate.
申请公布号 US9224696(B2) 申请公布日期 2015.12.29
申请号 US201314095980 申请日期 2013.12.03
申请人 UNITED MICROELECTRONICS CORPORATION 发明人 Li Shih-Wei;Chu Yun-Han;Wei Guo-Chih
分类号 H01L23/00;H01L23/14;H01L21/02 主分类号 H01L23/00
代理机构 代理人 Tan Ding Yu
主权项 1. An integrated semiconductor device, comprising: a substrate; a first stress-inducing layer covering on the substrate; a second stress-inducing layer partially covering on the first stress-inducing layer; and an integrated circuit layer bonded over the substrate, wherein the substrate has a to surface, a bottom surface and at least one sidewall; the first stress-inducing layer and the second stress-inducing layer cover on the bottom surface and the at least one sidewall of the substrate; and the integrated circuit layer is bonded over the to surface of the substrate.
地址 Hsinchu TW