发明名称 |
MEASUREMENT SYSTEM FOR AVERAGE DISTANCE BETWEEN NANOSTRUCTURES |
摘要 |
The present invention provides a system of measuring an average interval between nano-structures which irradiates a laser beam towards a substrate forming nano-structures, and focuses diffracted laser beams by the nano-structures, and calculates the average interval of the nano-structures from diffracted patterns shown on an image sensor (400) which photographs diffracted patterns. |
申请公布号 |
KR20150144877(A) |
申请公布日期 |
2015.12.29 |
申请号 |
KR20140073577 |
申请日期 |
2014.06.17 |
申请人 |
ENLIGHTING CO., LTD. |
发明人 |
HWANG, YONG OON;KANG, DONG HO;KIM, TAE JIN;LEE, BYOUNG CHEON |
分类号 |
G01B11/14;B82B1/00;G01N21/39;G01N21/45;G01N21/84 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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