Adjustable non-dissipative voltage boosting snubber network

摘要

This disclosure describes a non-dissipative snubber circuit configured to boost a voltage applied to a load after the load's impedance rises rapidly. The voltage boost can thereby cause more rapid current ramping after a decrease in power delivery to the load which results from the load impedance rise. In particular, the snubber can comprise a combination of a unidirectional switch, a voltage multiplier, and a current limiter. In some cases, these components can be a diode, voltage doubler, and an inductor, respectively.

主权项

1. A power system comprising:
a DC power supply supplying DC power to first and second rails having a voltage between the first and second rails; a switching circuit receiving the DC power via the first and second rails and converting the DC power to a pulsed DC voltage, the pulsed DC voltage configured for application to a plasma load; and a snubber circuit coupled to the first and second rails such that the voltage between the first and second rails falls across the snubber circuit, the snubber circuit comprising:
a first unidirectional switch configured to allow current to pass from the first rail;a voltage multiplier coupled between the first unidirectional switch and the second rail, and configured to:
absorb and store energy from the DC power supply via the first unidirectional switch when an impedance seen by the switching circuit increases;boost the voltage between the first and second rails by virtue of absorbing and storing the energy from the DC power supply;then apply at least a portion of the stored energy to the switching circuit when the impedance seen by the switching circuit decreases and thereby decrease the voltage between the first and second rails; andan electrical node between the first unidirectional switch and the voltage multiplier; anda current limiter coupled between the electrical node and the first rail and limiting rises in current that the voltage multiplier discharges to the switching circuit.