Magnetic recording medium and method of manufacturing the same

摘要

According to one embodiment, a magnetic recording medium including a substrate and a magnetic recording layer formed on the substrate and including a plurality of projections is obtained. The array of the plurality of projections includes a plurality of domains in which the projections are regularly arranged, and a boundary region between the domains, in which the projections are irregularly arranged. The boundary region is formed along a perpendicular bisector of a line connecting the barycenters of adjacent projections.

主权项

1. A magnetic recording medium manufacturing method comprising:
forming a magnetic recording layer on a substrate; forming a mask layer on the magnetic recording layer; forming projecting patterns on the mask layer; transferring the projecting patterns to the mask layer; etching the magnetic recording layer through the mask layer having the projecting patterns; and removing the mask layer, the etching performed under a condition which meets an expression (1) below to form the magnetic recording layer including a plurality of projections having a shape combining a circular truncated conical shape as a vertex region, and a truncated polygonal conical shape as a bottom region:
X>Z−2Y/tan θ  (1) wherein X (nm) is a diameter of the projecting patterns of the mask layer, Y (nm) is an etching depth of the magnetic recording layer, Z (nm) is a dot pitch of the projecting patterns of the mask layer, and θ is a taper angle of a side surface of the projection with respect to a bottom surface thereof.