Exposure apparatus having blind and method of driving

摘要

An exposure apparatus includes a light source, a mask, a blind, and a blind driver. The light source emits light in a light emitting cycle. The mask is disposed over a substrate and includes an exposure window. A pattern is formed in the exposure window. The blind is disposed over the exposure window. The blind moves in a first direction to block a non-exposed area in the substrate. The blind is returned to pass through the exposure window area in a second direction opposite to the first direction. The blind includes a plurality of blocking plates. The blocking plates include a blocking portion and an opening portion. The blind driver drives the blind.

主权项

1. An exposure apparatus, comprising:
a light source to emit light in a light emitting cycle; a mask disposed over a substrate comprising an exposure window, a pattern being formed therein; a blind comprising at least one blocking plate group, each blocking plate group comprising a plurality of blocking plates in different planes configurable to block a non-exposed area of the substrate, each blocking plate comprising a blocking portion and an opening portion, the blind disposed over the exposure window to move in a first direction to block a non-exposed area of the substrate and to pass through the exposure window area in a second direction opposite to the first direction; and a blind driver to drive the blind and configured to position blocking portions and opening portions of the plurality of blocking plates to block a non-exposed area of the substrate from light when the plurality of blocking plates are moved in the first direction, and to position blocking portions and opening portions of the plurality of blocking plates to form a gray region of light on the mask when the plurality of blocking plates are moved in the second direction, wherein a width of the gray region in the first direction on the mask is: DG=2×DB×tan CA wherein DB is a distance between one of the blocking plates and the mask, and CA is an inclined angle of the light from the light source with respect to a direction perpendicular to the substrate, and a width of the blocking portion of the one blocking plate in the first direction is equal to or smaller than the width of the gray region.