Deposition of rutile films with very high dielectric constant

摘要

Anisotropic materials, such as rutile TiO2, can exhibit dielectric constant of 170 along the tetragonal axis of (001) direction, and dielectric constant of 86 along directions perpendicular to the tetragonal axis. Layer of anisotropic material nanorods, such as TiO2 nanorods, can form a seed layer to grow a dielectric layer that can exhibit the higher dielectric constant value in a direction parallel to the substrate surface. The anisotropic layer can then be patterned to expose a surface normal to the high dielectric constant direction. A conductive material can be formed in contact with the exposed surface to create an electrode/dielectric stack along the direction of high dielectric constant.

主权项

1. A method comprising
depositing nanorods of an anisotropic dielectric material on a substrate surface,
wherein the nanorods form a first layer,wherein the first layer is parallel to the substrate surface,wherein the nanorods are arranged in a direction parallel to each other,wherein the nanorods have a first crystal orientation,wherein the nanorods have a higher dielectric constant along the first crystal orientation than in an orientation perpendicular to the first crystal orientation; forming a second layer of the anisotropic dielectric material on the first layer,
wherein the second layer comprises substantially the same crystal orientation as the first crystal orientation; patterning the second layer to expose a side surface of the second layer,
wherein the side surface is substantially perpendicular to the substrate surface,wherein the side surface is substantially perpendicular to the first crystal orientation; forming a conductive layer in contact with the side surface,
wherein the conductive layer is operable as an electrode.