Beam scanning system

摘要

Apparatus for illuminating a probe of a probe microscope. A lens is arranged to receive a beam and focus it onto the probe. A scanning system varies over time the angle of incidence at which the beam enters the lens relative to its optical axis. The scanning system is typically arranged to move the beam so as to track movement of the probe, thereby maintaining the location on the probe at which the beam is focused. The scanning system may comprise a beam steering mirror which reflects the beam towards the lens; and a mirror actuator for rotating the beam steering mirror.

主权项

1. Apparatus for illuminating a probe of a probe microscope, the apparatus comprising:
a lens arranged to receive a radiation beam and direct it onto the probe; and a scanning system for varying over time the angle of incidence at which the beam enters the lens relative to its optical axis, wherein the beam is a detection beam which reflects from the probe to produce a reflected detection beam, and the apparatus further comprises:
a detection system arranged to receive the reflected detection beam from the probe and detect movement of the probe from the reflected detection beam, wherein the lens is also arranged to receive an actuation radiation beam and direct it onto the probe; anda modulation system for modulating the intensity of the actuation radiation beam.