Eddy current flaw detection system and eddy current flaw detection method

摘要

An eddy current flaw detection system includes an eddy current flaw detection probe having a substrate facing an inspection surface, and at least one exciting coil and at least two detecting coils provided on the substrate, a scanning device which scans the probe on the inspection surface, a scan control device which drives and controls the scanning device, an eddy current flaw detection device which acquires results of detection of a plurality of detection points corresponding to combinations of the exciting and detecting coils for each scan position of the probe, and a data processing/display device which processes data from the scan control device and the eddy current flaw detection device and thereby displays a result of flaw detection. The data processing/display device acquires three-dimensional coordinates of the detection points for each scan position of the probe and thereby creates three-dimensional flaw detection data.

主权项

1. An eddy current flaw detection system comprising:
an eddy current flaw detection probe having a substrate facing an inspection surface, and at least one exciting coil and at least two detecting coils provided on the substrate; a scanning device which scans the eddy current flaw detection probe on the inspection surface; a scan control device which drives and controls the scanning device to control a scan position and an attitude angle of the eddy current flaw detection probe; and an eddy current flaw detection device which acquires results of detection of a plurality of detection points corresponding to combinations of the exciting and detecting coils for each scan position of the eddy current flaw detection probe, wherein said eddy current flaw detection system includes: detection point three-dimensional coordinate acquiring means which acquires three-dimensional coordinates of the detection points for each scan position of the eddy current flaw detection probe; three-dimensional flaw detection data generating means which generates three-dimensional flaw detection data including the three-dimensional coordinates of the detection points and detection results thereof corresponding to the three-dimensional coordinates; display means which displays a three-dimensional model of the inspection surface and displays the detection results of the detection points on the three-dimensional model of the inspection surface in color tones, based on the three-dimensional flaw detection data, probe structure storing means which stores in advance relations in position between the detection points on the substrate of the eddy current flaw detection probe, wherein the detection point three-dimensional coordinate acquiring means includes: first detection point three-dimensional coordinate computing means which computes a three-dimensional coordinate of a specific detection point of the detection points corresponding to the scan position of the eddy current flaw detection probe based on control parameters of the scanning device, probe attitude angle computing means which computes a yaw angle of the eddy current flaw detection probe based on the control parameters of the scanning device, and second detection point three-dimensional coordinate computing means which plots the specific detection point on the three-dimensional model of the inspection surface, plots other detection points than the specific detection point on the three-dimensional model of the inspection surface based on the yaw angle of the eddy current flaw detection probe and the relations in position between the detection points on the substrate, and thereby computes three-dimensional coordinates of said other detection points.