APPARATUS FOR BEAM ALIGNMENT OF CHARGED PARTICLE BEAM AND METHOD FOR USING THEREOF

摘要

The present invention relates to a device for adjusting a charged particle beam irradiation angle and a method thereof and relates to a charged particle beam irradiation angle adjusting device which comprises: a charged particle beam source which emits a charged particle beam; an angle adjusting device which connects the charged particle beam source to a barrel and is made by coupling of a center ring and an O ring; and the barrel which is connected to the angle adjusting device, collects the charged particle beam by an electric field or a magnetic field, and includes a focusing lens group for forming a charged particle beam probe.