发明名称 Device for manufacturing organic light-emitting display panel and method of manufacturing organic light-emitting display panel using the same
摘要 A device for manufacturing an organic light-emitting display panel and a method of manufacturing an organic light-emitting display panel by using the same. A device for manufacturing an organic light-emitting display panel includes a plurality of chambers; a deposition unit configured to form a transfer layer on a film supplied into the plurality of chambers in a roll-to-roll process; and a laser thermal transfer device configured to transfer a pattern of the transfer layer formed on the film onto a substrate that is supplied into a chamber of the plurality of chambers.
申请公布号 US9224987(B2) 申请公布日期 2015.12.29
申请号 US201213457381 申请日期 2012.04.26
申请人 Samsung Display Co., Ltd. 发明人 Song Ha-Jin;Lee Seung-Mook
分类号 B32B38/10;H01L51/56;H01L51/00;C23C14/04;C23C14/56 主分类号 B32B38/10
代理机构 Christie, Parker & Kale, LLP 代理人 Christie, Parker & Kale, LLP
主权项 1. A method of manufacturing an organic light-emitting display panel, the method comprising: continuously supplying a film into a plurality of chambers in a roll-to-roll process; forming a transfer layer on a surface of the film using a deposition unit; transferring a substrate into a chamber of the plurality of chambers from a substrate transfer chamber; and transferring a pattern of the transfer layer formed on the film onto the substrate using a laser thermal transfer device that is spaced apart from the film, wherein a pattern mask is disposed between the laser thermal transfer device and the film, wherein a laser beam emitted from the laser thermal transfer device is transmitted through an opening formed in the pattern mask and irradiated on the film on which the transfer layer is deposited, wherein forming the transfer layer on the surface of the film using the deposition unit and transferring the pattern of the transfer layer onto the substrate using the laser thermal transfer device are performed in a same chamber of the plurality of chambers, wherein the substrate transfer chamber is maintained substantially in the same atmosphere in which the same chamber of the plurality of chambers is maintained.
地址 Yongin-si KR