发明名称 Piezoelectric element and method to remove extraneous vibration modes
摘要 A piezoelectric element and a manufacturing method to reduce extraneous radial vibration modes is disclosed, in an example embodiment, four slots, arranged at 90 degrees, are made in one surface such that the slots do not reach the opposite surface.
申请公布号 US9224938(B2) 申请公布日期 2015.12.29
申请号 US201113879748 申请日期 2011.04.11
申请人 Halliburton Energy Services, Inc. 发明人 Maki, Jr. Voldi E.
分类号 H01L41/08;B06B1/06;H01L41/09;H01L41/338;H01L41/33 主分类号 H01L41/08
代理机构 Schwegman Lundberg & Woessner, P.A. 代理人 Schwegman Lundberg & Woessner, P.A. ;Fite Benjamin
主权项 1. A method comprising: providing a piezoelectric element, having a first surface and a second surface opposite the first surface; modifying one of the first surface or the second surface such that radial modes of the piezoelectric element are reduced in operation of the piezoelectric element in a transducer such that the first surface or the second surface opposite the modified one is arranged as a sensing element.
地址 Houston TX US