发明名称 METHOD OF MANUFACTURING A PHOTO-FUNCTIONAL PATTERN STRUCTURE
摘要 The present invention relates to a method for manufacturing a photo-functional pattern structure. The method includes the following steps: forming a preparatory planar layer to cover a sacrificial pattern on an object after forming the sacrificial pattern on the object; and selectively removing the sacrificial pattern from the object and changing the preparatory planer layer into a lower photo-functional pattern, on which hollow holes corresponding to the sacrificial pattern are formed, and an upper planar layer, individually.
申请公布号 KR101580054(B1) 申请公布日期 2015.12.28
申请号 KR20140110722 申请日期 2014.08.25
申请人 KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION 发明人 LEE, HEON;KIM, YANG DOO
分类号 H01L51/56;H01L21/027 主分类号 H01L51/56
代理机构 代理人
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