| 摘要 |
To improve an ability to manufacture and economic efficiency while maintaining precision of a robot hand used in loading and unloading a substrate; the present invention comprises: a fork part including a plurality of hollow fingers separated at preset intervals to load and transfer a substrate on an upper surface, and a fixing frame to connect one side of the hollow fingers; a plate type pad part inserted into an opening hole formed on one surface of the hollow fingers, having an alignment fixing means arranged selectively on an upper surface; and a gap supporting bolt including a screw extension part screwed to a coupling hole formed in the plate type pad part, and an alignment head part arranged on one side of the screw extension part formed in a thickness corresponding to a second interval between the upper surface of the plate type pad part and an inner surface of an edge of the opening hole such that the upper surface of the alignment supporting means and the upper surface of the fork part can be arranged with a preset first interval therebetween. |
