| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a surface emitting laser capable of keeping mechanical strength when alleviating distortion due to oxidation by removing a part of an oxidized region in a current constriction layer. <P>SOLUTION: In this method of manufacturing the surface emitting laser, the current constriction layer is formed on an oxidized layer composing a partial layer of a multilayer film reflector on a substrate to restrict current injection to an active layer. In the surface emitting laser, the current constriction layer has an oxidized region removal portion where a part of the oxidation region is removed, and the oxidized region removal portion is formed by a region satisfying at least either one condition of the following (1)-(3), viewing from the center of a non-oxidized region. (1) The shape of the non-oxidized region is a polygon, and the region includes the direction of the apex thereof. (2) The substrate is an inclined substrate, and the region includes a direction opposite to the direction of the maximum angle of inclination. (3) The region includes the direction in which the electrical contact area of an electrode becomes maximum. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
