发明名称 Combination Interconnect Structure and Methods of Forming Same
摘要 An embodiment semiconductor device includes a substrate and a dielectric layer over the substrate. The dielectric layer includes a first conductive line and a second conductive line. The second conductive line comprises a different conductive material than the first conductive line.
申请公布号 US2015371939(A1) 申请公布日期 2015.12.24
申请号 US201414310618 申请日期 2014.06.20
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Yang Tai-I;Wang Yung-Chih;Chuang Cheng-Chi;Wu Chia-Tien;Lin Tien-Lu
分类号 H01L23/528;H01L21/768;H01L23/532 主分类号 H01L23/528
代理机构 代理人
主权项 1. A semiconductor device comprising: a dielectric layer over a substrate; a first conductive line in the dielectric layer; and a second conductive line in the dielectric layer, wherein the second conductive line comprises a different conductive material than the first conductive line.
地址 Hsin-Chu TW