MATHEMATICAL IMAGE ASSEMBLY IN A SCANNING-TYPE MICROSCOPE

摘要

A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps:
Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen;Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation;Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position, which method additionally comprises the following steps:In a first sampling session S1gathering detector data from a first collection P1 of sampling points distributed sparsely across the specimen;Repeating this procedure so as to accumulate a set {Pn} of such collections, gathered during an associated set {Sn} of sampling sessions, each set with a cardinality N>1;Assembling an image of the specimen by using the set {Pn} as input to an integrative mathematical reconstruction procedure,

wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}.

主权项

1. A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps:
providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen; providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation; causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position,
in a first sampling session S1, gathering detector data from a first collection P1 of sampling points distributed sparsely across the specimen;repeating this the procedure of gathering detector data from subsequent collections of sampling points so as to accumulate a set {Pn} of such collections, gathered during an associated set {Sn} of sampling sessions, each set with a cardinality N>1;assembling an image of the specimen by using the set {Pn} as input to an integrative mathematical reconstruction procedure,wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}.