| 发明名称 |
MEMS FLOW CONTROL CHIP FOR GAS CHROMATOGRAPHY |
| 摘要 |
A micro-electro-mechanical system (MEMS) flow control chip that can control the flow of gas and be configured to operate in a gas chromatography system are disclosed. The MEMS flow control chip can include at least one inlet port in the chip, at least one outlet port in the chip, at least one flow channel between the inlet and outlet ports, and at least one pneumatic valve in the chip for controlling a flow of gas through the flow channel and between the inlet port and outlet ports. Advantageously, the MEMS flow control chip can be positioned in an oven of the a gas chromatography system and have a temperature approximately the same as one or more chromatographic columns of the system. |
| 申请公布号 |
US2015369781(A1) |
申请公布日期 |
2015.12.24 |
| 申请号 |
US201514733192 |
申请日期 |
2015.06.08 |
| 申请人 |
The Penn State Research Foundation |
发明人 |
ZHENG Siyang;ZHOU Mingda;MYRICK Andrew J. |
| 分类号 |
G01N30/46;G01N30/60;B01D53/02 |
主分类号 |
G01N30/46 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS flow control chip comprising: a first inlet port in the chip, a first outlet port in the chip, a first flow channel between the first inlet port and the first outlet port in the chip, a first pneumatic valve in the chip for controlling a flow of gas through the first flow channel and between the first inlet port and the first outlet port, wherein the flow channel has a cross sectional area of between about 1 μm2 and 2.5 mm2. |
| 地址 |
University Park PA US |
