| 摘要 |
<p>A piezoelectric device (10, 50, 90, 100, 150, 160) includes: a substrate (12, 30, 110, 170); a first electrode (14, 32, 114) which is layered over the substrate (12, 30, 110, 170); a first piezoelectric film (16, 34, 116) which is layered over the first electrode (14, 32, 114); a metal oxide film (18, 36, 62A, 62B, 118) which is layered over the first piezoelectric film (16, 34, 116); a metal film (20, 38, 64A, 64B, 120) which is layered over the metal oxide film (18, 36, 62A, 62B, 118); a second piezoelectric film (22, 44, 74, 122) which is layered over the metal film (20, 38, 64A, 64B, 120); and a second electrode (24, 46, 82, 124) which is layered over the second piezoelectric film (22, 44, 74, 122).</p> |
