发明名称 SENSOR ARRAY WITH SELF-ALIGNED OPTICAL CAVITIES
摘要 A sensing device includes an array of sensing elements. Each sensing element includes a thermal infrared sensor, configured to output an electric signal in response to an intensity of infrared radiation that is incident on the sensor. An individual reflector is formed integrally with the sensor at a location separated from the sensor by one quarter wave at a selected wavelength of the infrared radiation.
申请公布号 US2015372162(A1) 申请公布日期 2015.12.24
申请号 US201514726536 申请日期 2015.05.31
申请人 Technion Research and Development Foundation Ltd. ;A.B. Todos Imaging 2012 Ltd. 发明人 Nemirovsky Yael;Shoham Yoav
分类号 H01L31/0232;H01L31/18;H01L27/144 主分类号 H01L31/0232
代理机构 代理人
主权项 1. A sensing device, comprising an array of sensing elements, each sensing element comprising: a thermal infrared sensor, configured to output an electric signal in response to an intensity of infrared radiation that is incident on the sensor; and an individual reflector, formed integrally with the sensor at a location separated from the sensor by one quarter wave at a selected wavelength of the infrared radiation.
地址 Haifa IL