ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF AND DISPLAY PANEL

摘要

The invention provides an array substrate, a method for manufacturing the array substrate, and a display panel, the array substrate includes a plurality of thin film transistors, and the method includes: S1. preparing a base substrate on which sources and drains of the thin film transistors are formed; S2. forming an insulation layer on the base substrate such that the insulation layer includes spacer regions and a plurality of strip-shaped electrode regions, and every two adjacent strip-shaped electrode regions are separated from each other by the spacer region; S3. forming a spacer layer on the spacer regions of the insulation layer; S4. forming a pattern including strip-shaped electrodes on the strip-shaped electrode regions of the insulation layer; S5. peeling off the spacer layer on the spacer region. The invention can prevent every two adjacent strip-shaped electrodes from interconnecting due to etching residues, so as to improve product performance.

主权项

1. A method for manufacturing an array substrate, wherein the array substrate includes a plurality of thin film transistors, and the method for manufacturing an array substrate includes steps of:
preparing a base substrate, on which sources and drains of thin film transistors are formed; forming an insulation layer on the base substrate, so that the insulation layer includes a plurality of spacer regions and a plurality of strip-shaped electrode regions, and every two adjacent strip-shaped electrode regions are separated from each other by the spacer region; forming a spacer layer on the spacer regions of the insulation layer; forming a pattern including strip-shaped electrodes on the strip-shaped electrode regions of the insulation layer; and peeling off the spacer layer on the spacer region.