IMAGE INSPECTION DEVICE, IMAGE INSPECTION METHOD, IMAGE INSPECTION PROGRAM AND COMPUTER READABLE RECORDING MEDIUM, AND APPARATUS HAVING IMAGE INSPECTION PROGRAM RECORDED THEREIN

摘要

PROBLEM TO BE SOLVED: To provide an image inspection device that applies a photometric stereo method enabling accurate and quick estimation of the azimuth and zenith angle of illumination, and a method of detecting an illumination direction.SOLUTION: An image inspection device includes: imaging means including imaging means 11 for photographing a workpiece WK from a fixed direction; illumination means including first illumination means 21 to fourth illumination means 24 for illuminating the workpiece WK from different directions at least three times; illumination control means for lighting the first illumination means 21 to the fourth illumination means 24 one by one in order; source image creation means for creating a plurality of source images by driving the imaging means 11 at respective illumination timings; and illumination direction estimation means 41g for detecting illumination directions that best match the actual illumination directions of the first illumination means 21 to the fourth illumination means 24, from the plurality of source images SP based on the plurality of source images created by the source image creation means.