PRODUCTION METHOD OF NANO STRUCTURE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a production method of a nano structure thin film capable of forming stably a nano-sized projection in a wide region.SOLUTION: In a production method of a nano structure thin film for forming a nano-sized projection on a substrate by sputtering, the nano-sized projection is formed stably in a wide region by performing sputtering in the state where the substrate is separated as far as 60 mm from a sputtering target.