发明名称 熱電変換素子及びその製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a thermoelectric conversion element including characteristics of high electromotive force, high electrical conductivity and low thermal conductivity, thereby having high figure of a merit of a thermoelectric conversion element. <P>SOLUTION: A thermoelectric conversion element is formed by: forming a strontium titanate thin film buffer layer 11 which is doped with niobium or lanthanum and has a nonconducting anionic nonstoichiometric composition, on a single crystal substrate 9 of strontium titanate; and forming a strontium titanate thermoelectric thin film which is doped with niobium and lanthanum and has a stoichiometric composition, or a strontium titanate thermoelectric thin film 12 which is doped with niobium and lanthanum and has a nonstoichiometric composition, on the thin film buffer layer 11. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5834871(B2) 申请公布日期 2015.12.24
申请号 JP20110273189 申请日期 2011.12.14
申请人 富士通株式会社 发明人 石井 雅俊;ジョン ベネキ;栗原 和明
分类号 H01L35/22;H01L35/34 主分类号 H01L35/22
代理机构 代理人
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