发明名称 研磨用組成物並びにそれを用いた研磨方法及び基板の製造方法
摘要 A polishing composition of the present invention contains abrasive grains each having a surface with protrusions. Parts of the abrasive grains have larger particle diameters than the volume-based average particle diameter of the abrasive grains, and the average of values respectively obtained by dividing a height of each protrusion on the surface of each abrasive grain belonging to the parts of the abrasive grains by the width of a base portion of the same protrusion is 0.170 or more. Protrusions on the surfaces of abrasive grains belonging to the parts of the abrasive grains that have larger particle diameters than the volume-based average particle diameter of the abrasive grains have an average height of 3.5 nm or more. The polishing composition has a content of an organic alkali of 100 mmol or less per kilogram of the abrasive grains in the polishing composition.
申请公布号 JP5838083(B2) 申请公布日期 2015.12.24
申请号 JP20110270621 申请日期 2011.12.09
申请人 株式会社フジミインコーポレーテッド 发明人 玉井 一誠;芦高 圭史;坪田 翔吾
分类号 B24B37/00;H01L21/304 主分类号 B24B37/00
代理机构 代理人
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