发明名称 複数の多層体を熱処理するための装置および方法
摘要 <p>A device for continuous heat-treating of at least two multilayer bodies on at least two process levels disposed one beneath another in at least one heating chamber and at least one cooling chamber, which are arranged one after another is described. The heating chamber of the device has a first process level and a second process level. The cooling chamber of the device has a cooling device, the first process level and the second process level.</p>
申请公布号 JP5836379(B2) 申请公布日期 2015.12.24
申请号 JP20130525314 申请日期 2011.08.25
申请人 サン−ゴバン グラス フランス 发明人 フユアフアンガー,マルテイン;ヨスト,シユテフアン
分类号 H01L21/477;H01L21/20;H01L21/268;H01L21/324;H01L21/42;H01L31/18 主分类号 H01L21/477
代理机构 代理人
主权项
地址