METHOD FOR CONTROLLING SCANNING PROFILE IN CHARGED PARTICLE MICROSCOPE AND APPARATUS USING THEREOF

摘要

The present invention relates to a method for controlling a scanning signal of a charged particle beam microscope, more specifically, to a method for controlling a scanning signal capable of improving a distorted image on a surface of a sample caused by a deflector, and an apparatus using the same, the method for generating a scanning signal of a charged particle beam microscope, wherein the charged particle beam microscope comprises: at least one deflector for controlling and changing the direction of irradiation of a charged particle beam; a scanning waveform generator for generating a scanning profile for controlling the direction of irradiation of the charged particle beam and providing the same to the deflector; and a scanning waveform control unit for controlling a current waveform which is actually outputted from the deflector.