| 摘要 |
According to an apparatus for treating a wafer-shaped product, a spin chuck is provided for holding and rotating the wafer-shaped product. A liquid dispenser comprises a check valve disposed to prevent a process liquid from dripping out of a discharge nozzle of the liquid dispenser. A valve seat of the check valve is disposed at a distance in a range of 20-100 mm from an outlet opening of the discharge nozzle. |
