发明名称 CHARGED PARTICLE BEAM DEVICE, RECONSTRUCTED IMAGE PROCESSING SYSTEM AND METHOD OF THREE-DIMENSIONAL IMAGE
摘要 PROBLEM TO BE SOLVED: To solve such a problem that high speed high accuracy alignment of transmission image is impossible for the wide sample, inclination angle conditions, in the reconstruction of three-dimensional image of a transmission image.SOLUTION: In an imaging sequence for inclining a sample at a predetermined angle step, and acquiring first through N-th images for every inclination angle, the sample is aligned based on the results of three-dimensional phase correlation of a first reverse projection line image volume, and a second reverse projection image volume, corresponding to a temporary second image when the sample is inclined by 1 step, and then a second reverse projection line image volume corresponding to the second image of the sample after the alignment is determined as the reconstruction data.
申请公布号 JP2015232958(A) 申请公布日期 2015.12.24
申请号 JP20140119250 申请日期 2014.06.10
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 BABA NORIO;TOMONAGA SACHIHIKO;BABA MISUZU;HASHIMOTO TAKAHITO;YOTSUTSUJI TAKAFUMI
分类号 H01J37/26;G01N23/04;G01N23/225;H01J37/22;H01J37/28 主分类号 H01J37/26
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