摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a Schottky type ultraviolet ray sensor element in which a comparatively inexpensive and high quality material available in the market is utilized for an ultraviolet ray receiving layer and which has sufficient ultraviolet ray receiving sensitivity and speed even without high resistance layer in the ultraviolet ray receiving layer, and to provide an ultraviolet ray sensor using the Schottky type ultraviolet ray sensor element. <P>SOLUTION: An ultraviolet ray sensor element 1 comprises SrTiO<SB POS="POST">3</SB>single crystal doped with Nb of 0.01 wt% or more and 0.10 wt% or less and includes: a substrate 2 having a first surface and a second surface opposite to the first surface; a first electrode 3 which is formed on the first surface and receives ultraviolet rays; and a second electrode 4 formed on the second surface. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |