发明名称 PHOTOMULTIPLIER AND ITS MANUFACTURING METHOD
摘要 The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and a method of manufacturing the same. The photomultiplier comprises an enclosure having an inside kept in a vacuum state, whereas a photocathode emitting electrons in response to incident light, an electron multiplier section multiplying in a cascading manner the electron emitted from the photocathode, and an anode for taking out a secondary electron generated in the electron multiplier section are arranged in the enclosure. A part of the enclosure is constructed by a glass substrate having a flat part, whereas each of the electron multiplier section and anode is two-dimensionally arranged on the flat part in the glass substrate.
申请公布号 US2015371835(A1) 申请公布日期 2015.12.24
申请号 US201514841886 申请日期 2015.09.01
申请人 HAMAMATSU PHOTONICS K.K. 发明人 KYUSHIMA Hiroyuki;SHIMOI Hideki;KAGEYAMA Akihiro;INOUE Keisuke;ITO Masuo
分类号 H01J43/08;H01J9/26 主分类号 H01J43/08
代理机构 代理人
主权项
地址 Hamamatsu-shi JP