发明名称 ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METHODS USING THE SAME
摘要 An actuator includes a housing, a movable part, and an advancing unit that is at least temporarily connected to the movable part. The advancing unit includes a deformation unit and a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation. The movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit and the deformation unit is disposed along the effective direction of the actuator upon the removal of the vector component on the deformation unit.
申请公布号 US2015370176(A1) 申请公布日期 2015.12.24
申请号 US201514840394 申请日期 2015.08.31
申请人 Carl Zeiss SMT GmbH 发明人 Weber Ulrich;Hembacher Stefan;Schoeppach Armin
分类号 G03F7/20;F16H21/44 主分类号 G03F7/20
代理机构 代理人
主权项
地址 Oberkochen DE
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