SUBSTRATE ATTACHING/DETACHING PART FOR SUBSTRATE HOLDER, AND WET-TYPE SUBSTRATE PROCESSING APPARATUS WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a substrate attaching/detaching part capable of accommodating a number of substrate holders without increasing footprints and capable of accelerating a processing speed.SOLUTION: The substrate attaching/detaching part includes: a stocker in which a plurality of substrate holders 80 are accommodated and which is configured to align the substrate holders 80 perpendicularly to each other in a horizontal attitude; a first substrate holder conveying mechanism which puts in and puts out the substrate holder 80 between the first substrate holder conveying mechanism and the stocker; an elevating mechanism for elevating the first substrate holder conveying mechanism in a perpendicular direction; a second substrate holder conveying mechanism which delivers the substrate holder between the second substrate holder conveying mechanism and the first substrate holder conveying mechanism; and a substrate attaching/detaching mechanism for attaching/detaching substrates to/from the substrate holders which are held by the second substrate holder conveying mechanism.