INFRARED DETECTION ELEMENT, INFRARED DETECTOR, AND INFRARED TYPE GAS SENSOR

摘要

An infrared detection element includes first and second pyroelectric elements which are arranged in a single pyroelectric substrate. First pyroelectric element includes a first surface electrode. a first back face electrode, and a first portion interposed between first surface and back face electrodes. First portion is provided as part of pyroelectric substrate. Second pyroelectric element includes a second surface electrode, a second back face electrode, and a second portion interposed between second surface and back face electrodes. Second portion is provided as part of pyroelectric substrate. Pyroelectric substrate is provided in part thereof surrounding first pyroelectric element with a slit shaped along an outer periphery of first pyroelectric element. Slit is formed out of regions in which a first surface wiring and a first back face wiring are disposed. Part of pyroelectric substrate surrounding second pyroelectric element is continuously formed over an entire circumference of second portion.

主权项

1. An infrared detection element comprising a first pyroelectric element and a second pyroelectric element,
the first pyroelectric element and the second pyroelectric element being arranged in a single pyroelectric substrate, the first pyroelectric element comprising:
a first surface electrode provided on a surface of the single pyroelectric substrate;a first back face electrode provided on a back face of the single pyroelectric substrate; anda first portion interposed between the first surface electrode and the first back face electrode, the first portion being provided as part of the single pyroelectric substrate, the first back face electrode facing the first surface electrode through the first portion, the second pyroelectric element comprising:
a second surface electrode provided on the surface of the single pyroelectric substrate;a second back face electrode provided on the back face of the single pyroelectric substrate; anda second portion interposed between the second surface electrode and the second back face electrode. the second portion being provided as part of the single pyroelectric substrate. the second back face electrode facing the second surface electrode through the second portion. the single pyroelectric substrate being provided on the surface thereof with a first surface wiring and a second surface wiring that are electrically connected with the first surface electrode and the second surface electrode, respectively, the single pyroelectric substrate being provided on the back face thereof with a first back face wiring and a second back face wiring that are electrically connected with the first back face electrode and the second back face electrode, respectively, the single pyroelectric substrate being provided in part thereof surrounding the first pyroelectric element with a slit that is shaped along an outer periphery of the first pyroelectric element, the slit being formed out of regions in which the first surface wiring and the first back face wiring are disposed, and part of the single pyroelectric substrate surrounding the second pyroelectric element being continuously formed over an entire circumference of the second portion.