| 发明名称 |
METAL-DIELECTRIC OPTICAL FILTER, SENSOR DEVICE, AND FABRICATION METHOD |
| 摘要 |
An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers. |
| 申请公布号 |
US2015369980(A1) |
申请公布日期 |
2015.12.24 |
| 申请号 |
US201414308343 |
申请日期 |
2014.06.18 |
| 申请人 |
JDS Uniphase Corporation |
发明人 |
Ockenfuss Georg J.;Gustafson Tim;Kuna Jeffrey James;Bilger Markus;Bradley Richard A. |
| 分类号 |
G02B5/28;G02B1/10;H01L27/146 |
主分类号 |
G02B5/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An optical filter, disposed on a substrate, comprising:
one or more dielectric layers; and one or more metal layers, stacked in alternation with the one or more dielectric layers on the substrate, wherein each of the one or more metal layers has a tapered edge, at a periphery of the optical filter, that is protectively covered by at least one of the one or more dielectric layers. |
| 地址 |
Milpitas CA US |
