| 摘要 |
This laser system may be provided with: a plurality of laser devices; a beam delivery device configured in a manner so as to output pulsed laser light formed into a beam by grouping a plurality of pulsed laser light respectively output from a plurality of laser devices; and a beam parameter measurement device that is disposed at the light path of the pulsed laser light formed into a beam and that measures the beam parameters of each pulsed laser light contained in the plurality of pulsed laser light and the beam parameters of the pulsed laser light formed into a beam. |
