| 摘要 |
A variable power relay optical system (1, 2, 3, 4, 5, 100) is arranged closer to an image side than an imaging optical system (10). The variable power relay optical system (1,2,3,4,5,100) includes, in order from a side of the imaging optical system (10), a front group (FG) that is arranged between the imaging optical system (10) and a position of an image (I1) of a sample that is formed by the imaging optical system (10), the front group (FG) forming an intermediate image (12) formed by reducing the image (I1), and a rear group (RG) that forms a relay image (13) formed by magnifying the intermediate image (I2), the rear group (RG) including a plurality of lens groups (G3, G4, G5) that each move along an optical axis so as to change magnification of the rear group (RG) without changing a distance from the front group (FG) to the relay image (I3). |
